HOPG/ZnO/HOPG pressure sensor

New Design of Mems piezoresistive pressure sensor

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...

Modeling of capacitance and sensitivity of a MEMS pressure sensor

In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM).  It can b...

Smart differential pressure sensor

This paper presents design and assembly of mixed electronic circuitry for measured signal processing of the capacitive difference pressure sensor, as well as analysis of the obtained results. The smart pressure sensor provides values of measured pressure via 4 20 mA current loop output. The loop current is also used for sensor circuitry supplying. This means that current consumption of the whol...

Bulk Micromachined Pressure Sensor

Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.

Intracranial Pressure Sensor